Coaxial barrel-type assaying device
Coaxial barrel-type plasma device
In addition to the ashing applications for semiconductor wafers and small substrates with photoresist, it is effective when you want to utilize processing from all directions using isotropic plasma. For mass production, please refer to the YSP650W, which processes 50 sheets at a time.
- Company：ヤマトマテリアル
- Price：Other
